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Rotating pocket heater : ウィキペディア英語版 | Rotating pocket heater A rotating pocket heater holds and rotates a substrate during vacuum deposition. During rotation, the substrate is sequentially exposed to more than one environment, for example, heat, oxygen, metal vapor, etc. Rotating pocket heaters can be used to create superconducting layers on planar semiconductors used in microwave applications. ==Magnesium diboride==
The illustration on the right shows an example of a pocket heater being used to deposit a layers of magnesium diboride on a substrate. A vertical shaft (32) turns a horizontal disk (30) several hundred rotations per minute (RPM). The illustration shows two of several substrates (14) attached to the underside of the rotating disk. The substrates are attached at their edges, so that most of the undersides of the substrates are exposed to the vapor below. The entire apparatus is enclosed in a chamber kept at low pressure by a vacuum pump. Magnesium diboride (MgB2) is an ionic solid with superconducting properties. Vapor deposition is difficult, because the vapor pressue of magnesium is much higher than boron. The pocker heater solves this problem by providing a separate environment for each material.
抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)』 ■ウィキペディアで「Rotating pocket heater」の詳細全文を読む
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